Bulk-Titanium Waveguide – a New Building Block for Microwave Planar Circuits
نویسندگان
چکیده
We developed a new building block for constructing planar microwave circuitry: bulk titanium waveguide. The waveguide is formed by deep trench etching, dielectric gap filling, and planarization. The high aspect ratio of the resulting structure provides superior field confinement, low crosstalk, therefore a small footprint. To enable bulk titanium as a substrate compatible with microfabrication, we developed a suite of techniques that overcome unique manufacturing issues associated with titanium. The propagation loss of the waveguides was measured to be ~0.68dB/mm at 40GHz.
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